JPH0373416B2 - - Google Patents
Info
- Publication number
- JPH0373416B2 JPH0373416B2 JP26429985A JP26429985A JPH0373416B2 JP H0373416 B2 JPH0373416 B2 JP H0373416B2 JP 26429985 A JP26429985 A JP 26429985A JP 26429985 A JP26429985 A JP 26429985A JP H0373416 B2 JPH0373416 B2 JP H0373416B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- sliding
- effect
- elements
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
- Non-Mechanical Conveyors (AREA)
- Control Of Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26429985A JPS62124850A (ja) | 1985-11-25 | 1985-11-25 | 位置決めテ−ブル装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26429985A JPS62124850A (ja) | 1985-11-25 | 1985-11-25 | 位置決めテ−ブル装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62124850A JPS62124850A (ja) | 1987-06-06 |
| JPH0373416B2 true JPH0373416B2 (en]) | 1991-11-21 |
Family
ID=17401243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26429985A Granted JPS62124850A (ja) | 1985-11-25 | 1985-11-25 | 位置決めテ−ブル装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62124850A (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4601240B2 (ja) * | 2002-02-21 | 2010-12-22 | 株式会社アイエイアイ | ステージ |
-
1985
- 1985-11-25 JP JP26429985A patent/JPS62124850A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62124850A (ja) | 1987-06-06 |
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